The NanoFab facility at the University of Ottawa provides users with open access to cutting-edge tools within the research facility, specializing in nanofabrication and characterization. Our facilities are open to both academic and industrial researchers, which makes the NanoFab ideal for prototype development and fabrication.

**THE NANOFAB FACILITY IS BEING RENOVATED**

There are some exciting changes coming to the uOttawa NanoFab which means there are going to be disruptions in the facility until the end of May 2026 (approximately). ARC 305 will be added to the NanoFab and will be set up as a Metrology Lab (gowning will not be necessary). Completion of this lab is scheduled for the end of October 2025. A new clean room will be added (333D) and the yellow room will be expanded (333A) with completion scheduled by the end May 2026. 333B and C will remain untouched. ARC 329 will become a dirty lab with sink and fume hood for electroplating, general chemical work and back-end processing with completion scheduled by the end of May 2026.
We will also be adding new tools: a Elionix Boden 100 kV e-beam lithography system, a Veeco Fiji atomic layer deposition system, a KLOE Dilase 650 direct-write (maskless) laser lithography system, a Class 100 fume hood for lithography, a new Laurell spin coating system, an Oxford Plasma Pro 80 RIE system, a critical point dryer, a tube furnace, a sputtering system (dual RF / dual DC sources), a small-chamber evaporator, a goniometer, and a Centrifuge.
We appreciate your patience and understanding as this renovation moves forward. If you have any questions, please do not hesitate to contact Betty (nanofabadmin@uottawa.ca), Spyros (sntais@uottawa.ca) or Prof Pierre Berini (pberini@uottawa.ca)

Means of Access

Through the purchase of a membership, internal or external clients can obtain unlimited access to the NanoFab facilities and equipment within our three labs - wet chemistry, metrology, and white and yellow clean rooms (Class 10,000) - including tool training provided by a lab technologist. Alternatively, we offer fee-for-service on all of our tools.

Our team consists of a Director (Prof. Pierre Berini), Administrative Assistant, and several Lab Technologists. This group maintains the facilities, instructs and assists users, and provides nanofabrication services to help clients achieve their research goals.

Exterior of the Advanced Research Complex

Facility and Equipment

Details regarding the NanoFab facility, equipment and additional resources

o	ORION NanoFab HIM/FIB

User Access

Access the facility and tools through the purchase of a membership.

Raith Pioneer SEM and e-beam lithography system

Fee-for-Service

Hire one of our qualified lab technologists to complete lab work on your behalf at an hourly rate.

Array of 25 heptamer-arranged nanoholes milled using He+ beam

Featured Projects

Take a look at the research being completed in the NanoFab.

Connect with us

Betty Yakimenko, Administrative Assistant

Advanced Research Complex (ARC), Room 350
25 Templeton Street
Ottawa, ON, Canada
K1N 6N5

Email: nanofabadmin@uottawa.ca
Tel: 613-562-5800 x 7632